icp-rie tool si 500 Search Results


icp-rie bosch process si 500  (SENTECH CO LTD)
90
SENTECH CO LTD icp-rie bosch process si 500
Icp Rie Bosch Process Si 500, supplied by SENTECH CO LTD, used in various techniques. Bioz Stars score: 90/100, based on 1 PubMed citations. ZERO BIAS - scores, article reviews, protocol conditions and more
https://www.bioz.com/product/icp-rie+tool+si+500/icp+rie+si+500/pm33448826-65-1-6
Average 90 stars, based on 1 article reviews
icp-rie bosch process si 500 - by Bioz Stars, 2026-09
90/100 stars
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icp-rie equipment  (SENTECH CO LTD)
90
SENTECH CO LTD icp-rie equipment
Icp Rie Equipment, supplied by SENTECH CO LTD, used in various techniques. Bioz Stars score: 90/100, based on 1 PubMed citations. ZERO BIAS - scores, article reviews, protocol conditions and more
https://www.bioz.com/product/icp-rie+tool+si+500/icp+rie+system/pm39327426-192-17-20
Average 90 stars, based on 1 article reviews
icp-rie equipment - by Bioz Stars, 2026-09
90/100 stars
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reactive ion etching (rie) stage sentech si 500 icp-rie plasma etcher  (SENTECH CO LTD)
90
SENTECH CO LTD reactive ion etching (rie) stage sentech si 500 icp-rie plasma etcher
The starting template ( a ) is an array of hollow 3D antennas made of polymeric resist (green) obtained by FIB milling, which is coated with a thin gold (yellow) layer. ( b <t>)</t> <t>Reactive</t> Ion Etching <t>(RIE)</t> stage to remove the gold deposited on the bottom Si 3 N 4 membrane (light blue). ( c ) Atomic Layer Deposition (ALD) stage to deposit a conformal layer of TiO 2 (or SiO 2 , orange). ( d ) Evaporation stage in presence of silane (dark grey) atmosphere. (e) Spin coating stage to deposit the PMMA (dark blue) layer. ( f ) Evaporation of a thin gold layer.
Reactive Ion Etching (Rie) Stage Sentech Si 500 Icp Rie Plasma Etcher, supplied by SENTECH CO LTD, used in various techniques. Bioz Stars score: 90/100, based on 1 PubMed citations. ZERO BIAS - scores, article reviews, protocol conditions and more
https://www.bioz.com/product/icp-rie+tool+si+500/reactive+ion+etching+system/pmc04921826-151-5-10
Average 90 stars, based on 1 article reviews
reactive ion etching (rie) stage sentech si 500 icp-rie plasma etcher - by Bioz Stars, 2026-09
90/100 stars
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sli 670 laser interferometer  (SENTECH CO LTD)
90
SENTECH CO LTD sli 670 laser interferometer
The starting template ( a ) is an array of hollow 3D antennas made of polymeric resist (green) obtained by FIB milling, which is coated with a thin gold (yellow) layer. ( b <t>)</t> <t>Reactive</t> Ion Etching <t>(RIE)</t> stage to remove the gold deposited on the bottom Si 3 N 4 membrane (light blue). ( c ) Atomic Layer Deposition (ALD) stage to deposit a conformal layer of TiO 2 (or SiO 2 , orange). ( d ) Evaporation stage in presence of silane (dark grey) atmosphere. (e) Spin coating stage to deposit the PMMA (dark blue) layer. ( f ) Evaporation of a thin gold layer.
Sli 670 Laser Interferometer, supplied by SENTECH CO LTD, used in various techniques. Bioz Stars score: 90/100, based on 1 PubMed citations. ZERO BIAS - scores, article reviews, protocol conditions and more
https://www.bioz.com/product/icp-rie+tool+si+500/sli+670+laser+interferometer/pmc06187842-100-15-17
Average 90 stars, based on 1 article reviews
sli 670 laser interferometer - by Bioz Stars, 2026-09
90/100 stars
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icp-rie ne-550h  (ULVAC)
90
ULVAC icp-rie ne-550h
The starting template ( a ) is an array of hollow 3D antennas made of polymeric resist (green) obtained by FIB milling, which is coated with a thin gold (yellow) layer. ( b <t>)</t> <t>Reactive</t> Ion Etching <t>(RIE)</t> stage to remove the gold deposited on the bottom Si 3 N 4 membrane (light blue). ( c ) Atomic Layer Deposition (ALD) stage to deposit a conformal layer of TiO 2 (or SiO 2 , orange). ( d ) Evaporation stage in presence of silane (dark grey) atmosphere. (e) Spin coating stage to deposit the PMMA (dark blue) layer. ( f ) Evaporation of a thin gold layer.
Icp Rie Ne 550h, supplied by ULVAC, used in various techniques. Bioz Stars score: 90/100, based on 1 PubMed citations. ZERO BIAS - scores, article reviews, protocol conditions and more
https://www.bioz.com/product/icp-rie+tool+si+500/inductively+coupled+plasma+apparatus+ne550/pmc11828937-182-11-12
Average 90 stars, based on 1 article reviews
icp-rie ne-550h - by Bioz Stars, 2026-09
90/100 stars
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shuttleline icp-rie  (Unaxis USA Inc)
90
Unaxis USA Inc shuttleline icp-rie
The starting template ( a ) is an array of hollow 3D antennas made of polymeric resist (green) obtained by FIB milling, which is coated with a thin gold (yellow) layer. ( b <t>)</t> <t>Reactive</t> Ion Etching <t>(RIE)</t> stage to remove the gold deposited on the bottom Si 3 N 4 membrane (light blue). ( c ) Atomic Layer Deposition (ALD) stage to deposit a conformal layer of TiO 2 (or SiO 2 , orange). ( d ) Evaporation stage in presence of silane (dark grey) atmosphere. (e) Spin coating stage to deposit the PMMA (dark blue) layer. ( f ) Evaporation of a thin gold layer.
Shuttleline Icp Rie, supplied by Unaxis USA Inc, used in various techniques. Bioz Stars score: 90/100, based on 1 PubMed citations. ZERO BIAS - scores, article reviews, protocol conditions and more
https://www.bioz.com/product/icp-rie+tool+si+500/shuttleline+icp+rie/pm25511421-144-32-31
Average 90 stars, based on 1 article reviews
shuttleline icp-rie - by Bioz Stars, 2026-09
90/100 stars
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nld-570 icp rie  (ULVAC)
90
ULVAC nld-570 icp rie
The starting template ( a ) is an array of hollow 3D antennas made of polymeric resist (green) obtained by FIB milling, which is coated with a thin gold (yellow) layer. ( b <t>)</t> <t>Reactive</t> Ion Etching <t>(RIE)</t> stage to remove the gold deposited on the bottom Si 3 N 4 membrane (light blue). ( c ) Atomic Layer Deposition (ALD) stage to deposit a conformal layer of TiO 2 (or SiO 2 , orange). ( d ) Evaporation stage in presence of silane (dark grey) atmosphere. (e) Spin coating stage to deposit the PMMA (dark blue) layer. ( f ) Evaporation of a thin gold layer.
Nld 570 Icp Rie, supplied by ULVAC, used in various techniques. Bioz Stars score: 90/100, based on 1 PubMed citations. ZERO BIAS - scores, article reviews, protocol conditions and more
https://www.bioz.com/product/icp-rie+tool+si+500/dry+etching+nld+570/pmc07670652-86-7-6
Average 90 stars, based on 1 article reviews
nld-570 icp rie - by Bioz Stars, 2026-09
90/100 stars
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icp-rie ne750  (ULVAC)
90
ULVAC icp-rie ne750
The starting template ( a ) is an array of hollow 3D antennas made of polymeric resist (green) obtained by FIB milling, which is coated with a thin gold (yellow) layer. ( b <t>)</t> <t>Reactive</t> Ion Etching <t>(RIE)</t> stage to remove the gold deposited on the bottom Si 3 N 4 membrane (light blue). ( c ) Atomic Layer Deposition (ALD) stage to deposit a conformal layer of TiO 2 (or SiO 2 , orange). ( d ) Evaporation stage in presence of silane (dark grey) atmosphere. (e) Spin coating stage to deposit the PMMA (dark blue) layer. ( f ) Evaporation of a thin gold layer.
Icp Rie Ne750, supplied by ULVAC, used in various techniques. Bioz Stars score: 90/100, based on 1 PubMed citations. ZERO BIAS - scores, article reviews, protocol conditions and more
https://www.bioz.com/product/icp-rie+tool+si+500/icp+rie+ne750/10__1002_slash_pssb__202400161-237-10-11
Average 90 stars, based on 1 article reviews
icp-rie ne750 - by Bioz Stars, 2026-09
90/100 stars
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icp-rie dry etching system  (SENTECH CO LTD)
90
SENTECH CO LTD icp-rie dry etching system
The starting template ( a ) is an array of hollow 3D antennas made of polymeric resist (green) obtained by FIB milling, which is coated with a thin gold (yellow) layer. ( b <t>)</t> <t>Reactive</t> Ion Etching <t>(RIE)</t> stage to remove the gold deposited on the bottom Si 3 N 4 membrane (light blue). ( c ) Atomic Layer Deposition (ALD) stage to deposit a conformal layer of TiO 2 (or SiO 2 , orange). ( d ) Evaporation stage in presence of silane (dark grey) atmosphere. (e) Spin coating stage to deposit the PMMA (dark blue) layer. ( f ) Evaporation of a thin gold layer.
Icp Rie Dry Etching System, supplied by SENTECH CO LTD, used in various techniques. Bioz Stars score: 90/100, based on 1 PubMed citations. ZERO BIAS - scores, article reviews, protocol conditions and more
https://www.bioz.com/product/icp-rie+tool+si+500/icp+reactive+ion+etching+system/10__1109_slash_jeds__2019__2899387-37-15-14
Average 90 stars, based on 1 article reviews
icp-rie dry etching system - by Bioz Stars, 2026-09
90/100 stars
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the icp-rie apparatus  (ULVAC)
90
ULVAC the icp-rie apparatus
The starting template ( a ) is an array of hollow 3D antennas made of polymeric resist (green) obtained by FIB milling, which is coated with a thin gold (yellow) layer. ( b <t>)</t> <t>Reactive</t> Ion Etching <t>(RIE)</t> stage to remove the gold deposited on the bottom Si 3 N 4 membrane (light blue). ( c ) Atomic Layer Deposition (ALD) stage to deposit a conformal layer of TiO 2 (or SiO 2 , orange). ( d ) Evaporation stage in presence of silane (dark grey) atmosphere. (e) Spin coating stage to deposit the PMMA (dark blue) layer. ( f ) Evaporation of a thin gold layer.
The Icp Rie Apparatus, supplied by ULVAC, used in various techniques. Bioz Stars score: 90/100, based on 1 PubMed citations. ZERO BIAS - scores, article reviews, protocol conditions and more
https://www.bioz.com/product/icp-rie+tool+si+500/the+icp+rie+apparatus/us08206768-210-16-20
Average 90 stars, based on 1 article reviews
the icp-rie apparatus - by Bioz Stars, 2026-09
90/100 stars
  Buy from Supplier
cm-icp rie  (NanoLab Inc)
90
NanoLab Inc cm-icp rie
The starting template ( a ) is an array of hollow 3D antennas made of polymeric resist (green) obtained by FIB milling, which is coated with a thin gold (yellow) layer. ( b <t>)</t> <t>Reactive</t> Ion Etching <t>(RIE)</t> stage to remove the gold deposited on the bottom Si 3 N 4 membrane (light blue). ( c ) Atomic Layer Deposition (ALD) stage to deposit a conformal layer of TiO 2 (or SiO 2 , orange). ( d ) Evaporation stage in presence of silane (dark grey) atmosphere. (e) Spin coating stage to deposit the PMMA (dark blue) layer. ( f ) Evaporation of a thin gold layer.
Cm Icp Rie, supplied by NanoLab Inc, used in various techniques. Bioz Stars score: 90/100, based on 1 PubMed citations. ZERO BIAS - scores, article reviews, protocol conditions and more
https://www.bioz.com/product/icp-rie+tool+si+500/cm+icp+rie/pm36245035-408-15-26
Average 90 stars, based on 1 article reviews
cm-icp rie - by Bioz Stars, 2026-09
90/100 stars
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icp-rie reactor  (SenTec Inc)
90
SenTec Inc icp-rie reactor
The starting template ( a ) is an array of hollow 3D antennas made of polymeric resist (green) obtained by FIB milling, which is coated with a thin gold (yellow) layer. ( b <t>)</t> <t>Reactive</t> Ion Etching <t>(RIE)</t> stage to remove the gold deposited on the bottom Si 3 N 4 membrane (light blue). ( c ) Atomic Layer Deposition (ALD) stage to deposit a conformal layer of TiO 2 (or SiO 2 , orange). ( d ) Evaporation stage in presence of silane (dark grey) atmosphere. (e) Spin coating stage to deposit the PMMA (dark blue) layer. ( f ) Evaporation of a thin gold layer.
Icp Rie Reactor, supplied by SenTec Inc, used in various techniques. Bioz Stars score: 90/100, based on 1 PubMed citations. ZERO BIAS - scores, article reviews, protocol conditions and more
https://www.bioz.com/product/icp-rie+tool+si+500/icp+rie+reactor/10__1063_slash_5__0213965-61-6-8
Average 90 stars, based on 1 article reviews
icp-rie reactor - by Bioz Stars, 2026-09
90/100 stars
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Image Search Results


The starting template ( a ) is an array of hollow 3D antennas made of polymeric resist (green) obtained by FIB milling, which is coated with a thin gold (yellow) layer. ( b ) Reactive Ion Etching (RIE) stage to remove the gold deposited on the bottom Si 3 N 4 membrane (light blue). ( c ) Atomic Layer Deposition (ALD) stage to deposit a conformal layer of TiO 2 (or SiO 2 , orange). ( d ) Evaporation stage in presence of silane (dark grey) atmosphere. (e) Spin coating stage to deposit the PMMA (dark blue) layer. ( f ) Evaporation of a thin gold layer.

Journal: Scientific Reports

Article Title: 3D coaxial out-of-plane metallic antennas for filtering and multi-spectral imaging in the infrared range

doi: 10.1038/srep28738

Figure Lengend Snippet: The starting template ( a ) is an array of hollow 3D antennas made of polymeric resist (green) obtained by FIB milling, which is coated with a thin gold (yellow) layer. ( b ) Reactive Ion Etching (RIE) stage to remove the gold deposited on the bottom Si 3 N 4 membrane (light blue). ( c ) Atomic Layer Deposition (ALD) stage to deposit a conformal layer of TiO 2 (or SiO 2 , orange). ( d ) Evaporation stage in presence of silane (dark grey) atmosphere. (e) Spin coating stage to deposit the PMMA (dark blue) layer. ( f ) Evaporation of a thin gold layer.

Article Snippet: The removal is performed with Reactive Ion Etching (RIE) stage (Sentech SI 500 ICP-RIE plasma etcher ), applying highly powerful Argon plasma.

Techniques: Membrane, Evaporation